The top international conference in the field of Micro Electro Mechanical Systems (MEMS) and the 31st IEEE MEMS Conference were held in Belfast, United Kingdom from January 21st to 25th, 2018. There are 5 papers presented by Prof. Chang Honglong's group in the Key Laboratory of Aerospace Micro-Nano Systems, Ministry of Education, School of Mechanical and Electrical Engineering, Northwestern Polytechnical University. The paper "A Micro Resonant Electrometer with 9-Electron Charge Resolution in Room Temperature After double-blind review by 38 internationally renowned MEMS experts of the Technical Program Committee (TPC), it won the best paper nomination award for this conference. At the same time, oral reports and poster presentations were held at the conference. The first author of this thesis is Yang Jing, a master student of the Institute of Mechanical and Electrical Engineering, the second author is a doctoral student Kang Yi and the instructor is Professor Chang Honglong. There were 874 paper submissions, 347 were accepted, and the acceptance rate was 40%. Award-winning authors Masters Yang Jing, Professor Chang Honglong and IEEE MEMS 2018 Chairman of the Two Conferences It is understood that the work of the task group has also received the Transducers 2015 Best Paper Nomination Award and the IEEE MEMS 2016 Best Paper Award respectively. These are the highest academic awards won by Chinese scholars at the top two international conferences in the field of MEMS. . The awarding process in the top international conference in the MEMS field is that dozens of world-class MEMS experts in the Technical Program Committee divided the papers into three groups and scored the papers on a double-blind basis. According to the score, the first 3-5 members of each group were nominated. Awards, and then according to the oral report of the conference and the poster display to conduct the evaluation, to determine the final winner of each group. Because there is only one review standard for the blind review stage, that is, the quality and influence of the dissertation, the selected papers are all outstanding research results in this field. The research group won the academic award in the MEMS field three times in a row for more than two years, and it is rare in this field, reflecting that the MEMS research of the West Industrial University has formed distinctive features and advantages in the world. Electrometer structure scanning electron microscope
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